Wafer Probe Station Cryogenic probe station Laser cutting probe station Hot chuck probe station


  • Find out our advanced probe station systems for precision I-V/C-V, pulsed I-V, RF/mmW tests, high voltage/current FA Tests, MEMS, Optoelectronic tests, etc.

Micropositioner Micromanipulator RF mmW micropositioner Frequency extender micropositioner


  • Positioners with accurate and stable probe placement are key factors to avoid erroneous measurement results. We offer positioners for various applications.



  • A wide variety of DC, RF/mmW probes, probe holders, cable assemblies, adapters, shield enclosures, vibration isolation tables optic related parts and components, etc.

Why Us?

Ease of Use



  • With our KitStart technique, it's never been so easy for a initial level user or a pro to set up and upgrade their probe station systems.




  • Our probe station systems are cost-effective with uncompromising quality for total customer satisfaction.

Value Added


Value Added

  • KitStart Technique allows you to start with a initial level probe station that meet your current test needs and upgrade your probe station while test requirements change over time.

About Us

KeyFactor Systems, Inc. is a manufacturer of precision and modular probing systems. With our KitStart technique, our systems can be upgraded easily as test requirements and applications change over time.

KeyFactor’s facilities are located in the United States and China and we offer a wide variety of solutions for advanced semiconductor tests. Our customers worldwide used our probing systems in test and measurement of various devices such as MEMS, NEMS, optoelectronics, photovoltaics ,etc. Our probing systems can be easily set up for accurate I-V/C-V tests, RF and mmW tests, high power tests and Hall effect tests.

Our corporate complement of highly trained individuals, whose first priority is the customer. As the cost-effective probing system manufacturer, we provide uncompromising quality for total customer satisfaction. With years of experience in semiconductor test and measurement industry, KeyFactor is committed to help you reduce your capital cost and increase test accuracy.